This book reviews the subject of Si quantum dots embedded in dielectric andits application to the realization of non volatile semiconductor memories and optoelectronicdevices, this dialing various approaches for the analysis of the materialsthrough transmission electron microscopy (TEM). The advantages coming froman innovative application of energy filtered TEM (EFETM) are put in clear evidence. Themanuscript then focuses on the synthesis of the materials: three different methodologiesfor the realization of the dots based on chemical vapor deposition (CVD)and ion implantation are described in detail, and physical models providing someunderstanding of the observed phenomenology are reported as well.

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Giuseppe Nicotra, obtained his PhD degree in Materials Science at the University of Catania in 2007. He is an expert on TEM as well as EELS and STEM. His field of study ranging from Si-based nanostructured to SiGe alloys. In 2006 he was awarded by the Microscopy Society of America for his preliminary studies of the STEM on biolological specimens.